Stability of Voltage References based on the Pull-in of a Micromechanical Structure
نویسنده
چکیده
Micromechanical structures have been designed, fabricated in silicon and tested for use as on-chip voltage reference. Applications are in electrical metrology and in integrated silicon microsystems. Microbeams of 100 μm length, 3 μm width and 11μm thickness are electrostatically actuated with a very reproducible pull-in voltage at 9.1 V. Devices demonstrated an initial drift of -12 mV over 10 days and stabilized with a 500 μV uncertainty. The temperature coefficient is -1 mV/K.
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